Ultrapure Water Treatment for Electronics
Our Ultrapure Water (UPW) solutions for the electronics industry are designed with a core philosophy of “ultimate purification + stable supply”. These systems address the critical need for contamination control, ensuring high-purity water for sensitive manufacturing processes like wafer cleaning, photolithography, and solar cell production.
Advanced Ultrapure Water Treatment Technology
Multi-stage Purification: The process includes three key stages.
pretreatment uses multi-media filtration, UF ultrafiltration, and activated carbon adsorption to remove suspended solids and residual chlorine.
core purification with dual-stage RO reverse osmosis and EDI electro-deionization removes over 99.9% of ions, achieving a resistivity of 18.25 MΩ·cm.
polishing stage uses a mixed-bed resin, UV oxidation, and terminal microfiltration to achieve final purity.
Advanced Delivery System: The systems use 316L stainless steel piping and a circulating turbulent flow design to prevent stagnant zones. They also feature online monitoring of parameters like resistivity and dissolved oxygen to ensure consistent quality.
Compliance and Performance for Electronics Manufacturing
Meets Strict Industry Standards
Our systems are designed to comply with SEMI F63-0304 and GB/T 11446.1-2013 "Electronic Grade Water" standards, making them suitable for 14nm and below processes.
High Stability
The continuous operation stability of our systems reaches 99.9%, with water quality fluctuations limited to ≤ ±0.5 MΩ·cm.
Energy-Efficient Design
The systems feature lower energy consumption and an extended regeneration cycle.
Full Process Validation
We provide comprehensive IQ/OQ/PQ validation and issue SEMI compliance reports.
Ultrapure Water System Applications
Frequently Asked Questions
Ultrapure water is water that has been purified to extremely high levels, with almost all contaminants removed. It is crucial for electronics manufacturing to prevent contamination from particles, ions, and organic matter that could damage sensitive components and affect product quality.
The system achieves high purity through a multi-stage process. Key stages include dual-stage reverse osmosis (RO) and EDI electro-deionization, which together remove more than 99.9% of all ions.
SEMI compliance refers to meeting the standards set by the Semiconductor Equipment and Materials International organization. Our systems comply with the SEMI F63-0304 standard, which ensures the ultrapure water is suitable for high-precision manufacturing.
Yes, we offer lab-scale validation and system customization to meet the specific water quality requirements of different processes.
The system is designed for continuous operation with 99.9% stability. It also uses a circulating turbulent flow design to prevent stagnant water and includes online monitoring to track key indicators.
The combination of dual-stage RO and EDI is highly effective. The RO removes the majority of dissolved salts, which makes the water easier for the EDI unit to polish. This leads to high ion removal efficiency and longer regeneration cycles, reducing energy consumption.
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Don’t let water quality issues stand in your way. MoerWater Purified Water Generator will help you solve all your water quality problems, improve operational efficiency, and ensure your product or experimental results are at the best level.
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